Member Profile
Membership type: full
Veenu Sisodia
Country of origin: India General field of specialization: Physics-
Degrees
Physics -
Current Research Activities
Physics
Swift heavy ion beam induced irradiation (a beam of varying energy, 120-350 MeV) effects on metal (Ti, Ni, Zr, Fe)/Si interfaces have been studied. Studies are done both in bi-layers and multi-layers systems. Metal silicide are potentially attractive materials in microelectronic devices for fabricating contacts, gate electrodes and interconnects. The technique has advantages of low temperature silicide formation and a reduction of the influence of diffusion barriers. Composition changes in bi-layers and multi-layers has been studied using the technique of ion beam mixing